Introduction to Microelectronic Fabrication: Volume 5 (Modular Series on Solid State Devices) Tapa blanda - 2001
de Richard Jaeger
Descripción de contraportada
Introduction to Microelectronic Fabrication, Second Edition, by Richard C. Jaeger, is a concise survey of the most up-to-date techniques in the field. It is devoted exclusively to processing and is highlighted by careful explanations, clean, simple language, and numerous fully solved example problems.
The second edition includes an entirely new chapter on MEMS, as well as substantial modifications to the chapters on MOS and bipolar process integration. Also included is new or expanded coverage of lithography and exposure systems, trench isolation, chemical mechanical polishing, shallow junctions, transient enhanced diffusion, copper Damascene processes and process simulation.
Detalles
- Título Introduction to Microelectronic Fabrication: Volume 5 (Modular Series on Solid State Devices)
- Autor Richard Jaeger
- Encuadernación Tapa blanda
- Edición [ Edition: secon
- Páginas 336
- Volúmenes 1
- Idioma ENG
- Editorial Pearson, USA
- Fecha de publicación October 17, 2001
- Ilustrado Sí
- ISBN 9780201444940 / 0201444941
- Peso 1.04 libras (0.47 kg)
- Dimensiones 9.2 x 7 x 0.48 pulgadas (23.37 x 17.78 x 1.22 cm)
- Library of Congress subjects Integrated circuits - Very large scale
- Número de catálogo de la Librería del Congreso de EEUU 2002276015
- Dewey Decimal Code 621.395
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Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid State Devices (2nd Edition)
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de Jaeger, Richard
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Introduction to Microelectronic Fabrication: Volume 5 (Modular Series on Solid State Devices)
de Jaeger, Richard
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