Fundamental Aspects of Silicon Oxidation Tapa dura - 2001 - 2001st Edición
de Yves J. Chabal (Editor)
Descripción de contraportada
This book presents fundamental experimental and theoretical developments relating to silicon oxidation for ultra-thin gate oxide formation. Starting with elementary processes taking place during wet chemical cleans prior to oxidation, the focus is then placed on the incorporation of oxygen into the silicon crystal for H-passivated, clean and oxidized silicon surfaces, including oxygen diffusion and defect formation. Experimental methods include scanning tunneling microscopy, x-ray photoelectron and infrared absorption spectroscopies, ion scattering and transmission electron microscopy. Most of the theoretical contributions are based on first-principles calculations, ranging from cluster calculations to supercell and slab calculations. Phenomenological modeling of oxidation is also discussed. The material presented here will enable the reader to gain a deeper understanding of silicon oxidation and ultra-thin oxide formation (and the processes that affect the morphology of silicon oxides).
Detalles
- Título Fundamental Aspects of Silicon Oxidation
- Autor Yves J. Chabal (Editor)
- Encuadernación Tapa dura
- Número de edición 2001st
- Edición 2001
- Páginas 262
- Volúmenes 1
- Idioma ENG
- Editorial Springer, Berlin Heidelberg New York
- Fecha de publicación 2001-04-24
- Ilustrado Sí
- Features Illustrated
- ISBN 9783540416821 / 354041682X
- Peso 1.25 libras (0.57 kg)
- Dimensiones 9.21 x 6.14 x 0.69 pulgadas (23.39 x 15.60 x 1.75 cm)
- Número de catálogo de la Librería del Congreso de EEUU 2001020054
- Dewey Decimal Code 620.11
Más ejemplares
Fundamental Aspects of Silicon Oxidation
de Yves Jean Chabal
- Nuevo
- Tapa dura
- Estado
- New
- Encuadernación
- Hardcover
- ISBN 10 / ISBN 13
- 9783540416821 / 354041682x
- Cantidad disponible
- 10
- Librería
-
Southport, Merseyside, United Kingdom
- Precio
-
EUR 134.53EUR 11.71 enviando a USA
Mostrar detalles
Fundamental Aspects of Silicon Oxidation (Springer Series in Materials Science, 46)
de Chabal, Yves J. [Editor]
- Nuevo
- Tapa dura
- Estado
- New
- Encuadernación
- Hardcover
- ISBN 10 / ISBN 13
- 9783540416821 / 354041682X
- Cantidad disponible
- 5
- Librería
-
campbelltown, Florida, United States
- Precio
-
EUR 196.36EUR 9.40 enviando a USA